VS
Sensing
Element
Thin Film
Gain Stage #2
Temperature
Compensation
and Ground
Reference
VOUT
and
Shift
Gain Stage #1
Circuitry
GND
Pins 1, 5, 6, 7, and 8 are No Connects
Figure 1. Fully Integrated Pressure Sensor Schematic
Table 1. Maximum Ratings(1)
Rating
Symbol
Value
Maximum Pressure (P1 > P2)
Storage Temperature
Operating Temperature
Output Source Current @ Full Scale Output(2)
Pmax
Tstg
TA
Io+
400
-40° to +125°
-40° to +125°
0.5
Output Sink Current @ Minimum Pressure Offset(2)
Io-
-0.5
1. Exposure beyond the specified limits may cause permanent damage or degradation to the device.
2. Maximum Output Current is controlled by effective impedance from Vout to Gnd or Vout to VS in the application circuit.
Units
kPa
°C
°C
mAdc
mAdc
MPXHZ6130A
2
Sensors
Freescale Semiconductor